Thin film stress and microstructure analysis by energy-dispersive diffraction
نویسندگان
چکیده
منابع مشابه
Application of Energy-dispersive Diffraction to the Analysis of Highly Inhomogeneous Residual Stress Fields in Thin Film Structures
For residual stress evaluation in complex substrate-coating-systems, energy-dispersive (ED) diffraction with energies up to 100 keV can be applied to analyze the near interface residual stress state in the substrate, because the high energy white beam penetrates the coating completely. By the example of an Al2O3/TiCN on WC coating system we have studied the feasibility for using the coating ref...
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ژورنال
عنوان ژورنال: Acta Crystallographica Section A Foundations and Advances
سال: 2014
ISSN: 2053-2733
DOI: 10.1107/s2053273314092754